Invention Grant
- Patent Title: Neutron detection structure
- Patent Title (中): 中子检测结构
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Application No.: US12135787Application Date: 2008-06-09
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Publication No.: US07791031B2Publication Date: 2010-09-07
- Inventor: Thomas R. Keyser , Cheisan J. Yue
- Applicant: Thomas R. Keyser , Cheisan J. Yue
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Shumaker & Sieffert, P.A.
- Main IPC: G01T3/08
- IPC: G01T3/08

Abstract:
A neutron detection structure built from a Silicon-On-Insulator memory cell includes a conversion layer for converting incident neutrons into emitted charged particles, a device layer for receiving the emitted charged particles, a buried oxide layer separating the conversion layer from the device layer and directly adjacent to the conversion layer and the device layer, an isolation layer, a passivation layer formed on the isolation layer opposite the device layer and buried oxide layer, a carrier adhered by an adhesion layer to the passivation layer opposite the isolation layer, and a plurality of conductive contacts to provide electrical contact to the device layer. A corresponding method for fabricating such a structure includes permanently bonding a carrier to a passivated SOI SRAM wafer, removing an insulative substrate, depositing a conversion layer where at least a portion of the insulative substrate was removed, and forming at least one opening in the conversion layer and the buried oxide layer to provide at least one electrical contact to the device layer.
Public/Granted literature
- US20090302227A1 Neutron Detection Structure Public/Granted day:2009-12-10
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