Invention Grant
US07791063B2 High hole mobility p-channel Ge transistor structure on Si substrate
有权
硅衬底上的高空穴迁移率p沟道Ge晶体管结构
- Patent Title: High hole mobility p-channel Ge transistor structure on Si substrate
- Patent Title (中): 硅衬底上的高空穴迁移率p沟道Ge晶体管结构
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Application No.: US11847780Application Date: 2007-08-30
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Publication No.: US07791063B2Publication Date: 2010-09-07
- Inventor: Mantu K. Hudait , Suman Datta , Jack T. Kavalieros , Peter G. Tolchinsky
- Applicant: Mantu K. Hudait , Suman Datta , Jack T. Kavalieros , Peter G. Tolchinsky
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Grossman, Tucker, Perreault & Pfleger, PLLC
- Main IPC: H01L29/205
- IPC: H01L29/205 ; H01L21/20

Abstract:
The present disclosure provides an apparatus and method for implementing a high hole mobility p-channel Germanium (“Ge”) transistor structure on a Silicon (“Si”) substrate. One exemplary apparatus may include a buffer layer including a GaAs nucleation layer, a first GaAs buffer layer, and a second GaAs buffer layer. The exemplary apparatus may further include a bottom barrier on the second GaAs buffer layer and having a band gap greater than 1.1 eV, a Ge active channel layer on the bottom barrier and having a valence band offset relative to the bottom barrier that is greater than 0.3 eV, and an AlAs top barrier on the Ge active channel layer wherein the AlAs top barrier has a band gap greater than 1.1 eV. Of course, many alternatives, variations and modifications are possible without departing from this embodiment.
Public/Granted literature
- US20090057648A1 High Hole Mobility P-Channel Ge Transistor Structure on Si Substrate Public/Granted day:2009-03-05
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