Invention Grant
US07791070B2 Semiconductor device fault detection system and method 有权
半导体器件故障检测系统及方法

Semiconductor device fault detection system and method
Abstract:
An outer border, and a seal ring substantially co-extensive with and spaced from the outer border is disclosed. A plurality of fault detection chains extend from adjacent the outer border to within the seal ring. At least a first one of the plurality of fault detection chains includes a contact pad, a first metal feature coupled to the contact pad by a first via in a passivation layer, a second metal feature coupled to the first metal feature by a second via, and a substrate contact coupled to the second metal feature by a third via.
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