Invention Grant
- Patent Title: Display device and manufacturing method thereof
- Patent Title (中): 显示装置及其制造方法
-
Application No.: US12201130Application Date: 2008-08-29
-
Publication No.: US07791075B2Publication Date: 2010-09-07
- Inventor: Satoshi Kobayashi , Ikuko Kawamata
- Applicant: Satoshi Kobayashi , Ikuko Kawamata
- Applicant Address: JP Kanagawa-Ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-Ken
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: JP2007-232667 20070907
- Main IPC: H01L29/04
- IPC: H01L29/04

Abstract:
A display device including a thin film transistor with high electric characteristics and high reliability, and a method for manufacturing the display device in high yield are proposed. In a display device including a channel stop thin film transistor with an inverted-staggered structure, the channel stop thin film transistor with the inverted-staggered structure includes a microcrystalline semiconductor film including a channel formation region. An impurity region including an impurity element imparting one conductivity type is formed as selected in a region in the channel formation region of the microcrystalline semiconductor film which does not overlap with a source electrode or a drain electrode. In the channel formation region, a non-doped region, to which the impurity element imparting one conductivity type is not added, is formed between the impurity region, which is a doped region to which the impurity element is added, and the source region or the drain region.
Public/Granted literature
- US20090065784A1 DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2009-03-12
Information query
IPC分类: