Invention Grant
- Patent Title: Semiconductor apparatus and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US11859641Application Date: 2007-09-21
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Publication No.: US07791082B2Publication Date: 2010-09-07
- Inventor: Tatsuya Iwasaki
- Applicant: Tatsuya Iwasaki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-262619 20060927
- Main IPC: H01L27/15
- IPC: H01L27/15

Abstract:
It is an object of the present invention to provide a technology of controlling a threshold voltage of a thin film transistor in which an amorphous oxide film is applied to a channel layer. There is provided a semiconductor apparatus including a plurality of kinds of transistors, each of the plurality of kinds of transistors including a channel layer made of an amorphous oxide containing a plurality of kinds of metal elements; and threshold voltages of the plurality of kinds of transistors are different from one another by changing an element ratio of the amorphous oxide.
Public/Granted literature
- US20080073653A1 SEMICONDUCTOR APPARATUS AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2008-03-27
Information query
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