Invention Grant
US07791107B2 Strained tri-channel layer for semiconductor-based electronic devices
有权
用于基于半导体的电子器件的应变三沟道层
- Patent Title: Strained tri-channel layer for semiconductor-based electronic devices
- Patent Title (中): 用于基于半导体的电子器件的应变三沟道层
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Application No.: US10869463Application Date: 2004-06-16
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Publication No.: US07791107B2Publication Date: 2010-09-07
- Inventor: Saurabh Gupta , Minjoo Larry Lee , Eugene A. Fitzgerald
- Applicant: Saurabh Gupta , Minjoo Larry Lee , Eugene A. Fitzgerald
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: H01L21/3205
- IPC: H01L21/3205

Abstract:
A semiconductor-based structure includes a substrate layer, a compressively strained semiconductor layer adjacent to the substrate layer to provide a channel for a component, and a tensilely strained semiconductor layer disposed between the substrate layer and the compressively strained semiconductor layer. A method for making an electronic device includes providing, on a strain-inducing substrate, a first tensilely strained layer, forming a compressively strained layer on the first tensilely strained layer, and forming a second tensilely strained layer on the compressively strained layer. The first and second tensilely strained layers can be formed of silicon, and the compressively strained layer can be formed of silicon and germanium.
Public/Granted literature
- US20050279992A1 Strained tri-channel layer for semiconductor-based electronic devices Public/Granted day:2005-12-22
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