Invention Grant
US07791166B2 Formation of dummy features and inductors in semiconductor fabrication 失效
在半导体制造中形成虚拟特征和电感器

Formation of dummy features and inductors in semiconductor fabrication
Abstract:
A structure and a method for forming the same. The structure includes (a) a substrate which includes a top substrate surface which defines a reference direction perpendicular to the top substrate surface, (b) N semiconductor regions on the substrate, and (c) P semiconductor regions on the substrate, N and P being positive integers. The N semiconductor regions comprise dopants. The P semiconductor regions do not comprise dopants. The structure further includes M interconnect layers on top of the substrate, the N semiconductor regions, and the P semiconductor regions, M being a positive integer. The M interconnect layers include an inductor. (i) The N semiconductor regions do not overlap and (ii) the P semiconductor regions overlap the inductor in the reference direction. A plane perpendicular to the reference direction and intersecting a semiconductor region of the N semiconductor regions intersects a semiconductor region of the P semiconductor regions.
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