Invention Grant
- Patent Title: Gas-fed hollow cathode keeper and method of operating same
- Patent Title (中): 供气空心阴极保持器及其运行方法
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Application No.: US11828917Application Date: 2007-07-26
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Publication No.: US07791260B2Publication Date: 2010-09-07
- Inventor: Alec Gallimore , Joshua Rovey
- Applicant: Alec Gallimore , Joshua Rovey
- Applicant Address: US MI Ann Arbor
- Assignee: The Regents of The University of Michigan
- Current Assignee: The Regents of The University of Michigan
- Current Assignee Address: US MI Ann Arbor
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: F03H1/00
- IPC: F03H1/00
Abstract:
A gas-fed hollow cathode keeper can reduce ion bombardment erosion by expelling gas through the keeper faceplate. The expelled gas effectively creates a high-pressure “shield” around the keeper such that bombarding ions suffer energy-reducing collisions before impacting the keeper. If the bombarding ion energy is reduced enough, the erosion is eliminated since sputtering is a threshold phenomenon.
Public/Granted literature
- US20080047256A1 GAS-FED HOLLOW CATHODE KEEPER AND METHOD OF OPERATING SAME Public/Granted day:2008-02-28
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