Invention Grant
- Patent Title: Organic electroluminescence element and manufacturing method of the same
- Patent Title (中): 有机电致发光元件及其制造方法
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Application No.: US11704077Application Date: 2007-02-07
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Publication No.: US07791275B2Publication Date: 2010-09-07
- Inventor: Tetsuo Oosono , Akio Nakamura
- Applicant: Tetsuo Oosono , Akio Nakamura
- Applicant Address: JP
- Assignee: Toppan Printing Co., Ltd.
- Current Assignee: Toppan Printing Co., Ltd.
- Current Assignee Address: JP
- Agency: Squire, Sanders & Dempsey L.L.P.
- Priority: JP2006-093499 20060330
- Main IPC: H05B33/00
- IPC: H05B33/00 ; H01J1/62

Abstract:
The present invention provides an organic EL element on which a protective film, which can be thickened and has a high barrier property, can be formed with high productivity, and a method of manufacturing the same. An organic electroluminescence element having a substrate 1, a first electrode 2 provided thereon, an organic luminescent layer 3, a second electrode 4, and a protective film 5 in this order, wherein the protective film 5 is formed with carbon-containing silicon nitride (SiNxCy), and the carbon content in the protective film 5 is continuously altered. The protective film of the element is formed by using an organic silicon compound, and nitrogen and hydrogen as a source gas, with a plasma CVD method while altering the voltage.
Public/Granted literature
- US20070228944A1 Organic electroluminescence element and manufacturing method of the same Public/Granted day:2007-10-04
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