Invention Grant
- Patent Title: Ionization vacuum gauge
- Patent Title (中): 电离真空计
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Application No.: US11877590Application Date: 2007-10-23
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Publication No.: US07791350B2Publication Date: 2010-09-07
- Inventor: Lin Xiao , Pi-Jin Chen , Zhao-Fu Hu , Yang Wei , Liang Liu , Shou-Shan Fan
- Applicant: Lin Xiao , Pi-Jin Chen , Zhao-Fu Hu , Yang Wei , Liang Liu , Shou-Shan Fan
- Applicant Address: CN Beijing TW Tu-Cheng, Taipei Hsien
- Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee: Tsinghua University,Hon Hai Precision Industry Co., Ltd.
- Current Assignee Address: CN Beijing TW Tu-Cheng, Taipei Hsien
- Agent Jeffrey T. Knapp
- Priority: CN200710074323 20070509
- Main IPC: G01L21/30
- IPC: G01L21/30 ; H01J49/10

Abstract:
An ionization vacuum gauge includes a linear cathode, an anode, and an ion collector. The linear cathode, the anode, and the ion collector are concentrically aligned and arranged from center to outer, in that order. The linear cathode includes a linear base and a field emission film deposited coating on the linear base. The ionization vacuum gauge with low power consumption can be used in a high vacuum system and/or some special vacuum system that is sensitive to heat and light. Such a gauge can be used to determine, simply yet accurately, pressures at relatively high vacuum levels.
Public/Granted literature
- US20080278173A1 IONIZATION VACUUM GAUGE Public/Granted day:2008-11-13
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