Invention Grant
US07791434B2 Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric 有权
使用选择性金属蚀刻并在压电中具有沟槽的声谐振器性能增强

Acoustic resonator performance enhancement using selective metal etch and having a trench in the piezoelectric
Abstract:
An acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, and a second electrode. The substrate has a first surface and the first electrode is adjacent the first surface of the substrate. The layer of piezoelectric material is adjacent the first electrode. The second electrode is adjacent the layer of piezoelectric material, and the second electrode lies in a first plane and has an edge. The layer of piezoelectric material has a recessed feature adjacent the edge of the second electrode.
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