Invention Grant
US07791731B2 Partial coherence interferometer with measurement ambiguity resolution
有权
具有测量模糊度分辨率的部分相干干涉仪
- Patent Title: Partial coherence interferometer with measurement ambiguity resolution
- Patent Title (中): 具有测量模糊度分辨率的部分相干干涉仪
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Application No.: US11958411Application Date: 2007-12-18
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Publication No.: US07791731B2Publication Date: 2010-09-07
- Inventor: David B. Kay
- Applicant: David B. Kay
- Applicant Address: US NY Rochester
- Assignee: Quality Vision International, Inc.
- Current Assignee: Quality Vision International, Inc.
- Current Assignee Address: US NY Rochester
- Agency: Harter Secrest & Emery
- Agent Stephen B. Salai, Esq.; Thomas B. Ryan
- Main IPC: G01B9/02
- IPC: G01B9/02
Abstract:
A partial coherence interferometer incorporates a focusing system for resolving measurement ambiguities. A focus-sensing beam is directed through a common objective with the measurement beam of the interferometer for conveying the beams to and from a test surface. An unambiguous measuring range is equated to a predetermined range of focusing errors.
Public/Granted literature
- US20090153839A1 PARTIAL COHERENCE INTERFEROMETER WITH MEASUREMENT AMBIGUITY RESOLUTION Public/Granted day:2009-06-18
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