Invention Grant
US07791737B2 Method and apparatus for interferometrically measuring the shape of a test object
有权
用于对测试对象的形状进行干涉测量的方法和装置
- Patent Title: Method and apparatus for interferometrically measuring the shape of a test object
- Patent Title (中): 用于对测试对象的形状进行干涉测量的方法和装置
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Application No.: US11939382Application Date: 2007-11-13
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Publication No.: US07791737B2Publication Date: 2010-09-07
- Inventor: Bernd Doerband , Matthias Dreher
- Applicant: Bernd Doerband , Matthias Dreher
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Priority: DE102006055070 20061122
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02

Abstract:
Electromagnetic illumination radiation is produced and provided as an input wave. The input wave passes through a diffractive optical element and leaves as an incoming measuring wave, the wave front of the input wave being transformed such that the wave front of the incoming measuring wave is adapted to the desired shape of the effective reflection surface. Furthermore, the test object is disposed in a test position in which the incoming measuring wave is reflected back to the diffractive optical element as a reflected measuring wave, the reflected measuring wave passing through the diffractive optical element and leaving as an outgoing measuring wave, the propagation direction of the outgoing measuring wave being deviated in relation to the opposite propagation direction of the input wave. A reference wave branched off from the illumination radiation interferes with the outgoing measuring wave this interference being recorded by detector.
Public/Granted literature
- US20090237672A1 Method and Apparatus for Interferometrically Measuring the Shape of a Test Object Public/Granted day:2009-09-24
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