Invention Grant
- Patent Title: Moveable micro-electromechanical device
- Patent Title (中): 可移动微机电装置
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Application No.: US12363671Application Date: 2009-01-30
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Publication No.: US07791787B2Publication Date: 2010-09-07
- Inventor: Mark W. Miles
- Applicant: Mark W. Miles
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee: QUALCOMM MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear, LLP
- Main IPC: G02B26/00
- IPC: G02B26/00
Abstract:
A MEMS device is provided. The MEMS device may include a first plate, a second plate and a third plate. The MEMS device may also include a first power supply configured to provide a voltage to the first plate and a second power supply configured apply a voltage to the second plate. In some embodiments, a third power supply may provide a voltage to the third plate.
Public/Granted literature
- US20090135463A1 MOVEABLE MICRO-ELECTROMECHANICAL DEVICE Public/Granted day:2009-05-28
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