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US07792393B2 Silicon waveguide photodetector and related method 有权
硅波导光电探测器及相关方法

Silicon waveguide photodetector and related method
Abstract:
A photodetector device, comprises an optical input, a nanoscale silicon waveguide and an electrical output. The waveguide is a high-contrast waveguide, with a refractive index contrast with the outside environment of more that 10%. The optical mode distribution across the waveguide has a peak intensity in correspondence of surface states of the nanoscale silicon waveguide. A related method is also disclosed.
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