Invention Grant
- Patent Title: Caddie-corner single proof mass XYZ MEMS transducer
- Patent Title (中): 球形单体质量XYZ MEMS传感器
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Application No.: US11966087Application Date: 2007-12-28
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Publication No.: US07793542B2Publication Date: 2010-09-14
- Inventor: Peter S. Schultz
- Applicant: Peter S. Schultz
- Applicant Address: US TX Austin
- Assignee: Freescale Semiconductor, Inc.
- Current Assignee: Freescale Semiconductor, Inc.
- Current Assignee Address: US TX Austin
- Agent Michael J. Balconi-Lamica
- Main IPC: G01P15/00
- IPC: G01P15/00 ; G01P15/125

Abstract:
A three-axis MEMS transducer featuring a caddie-corner proof mass comprises a planar main body portion of conductive material and a planar extra mass caddie-corner feature. The main body portion includes a width, length, and at least four side edges. An x-axis sense direction is defined from a first side edge to an opposite first side edge and a y-axis sense direction is defined from a second side edge to an opposite second side edge. The x-axis sense direction is perpendicular to the y-axis sense direction. The main body portion further includes at least two corners. The caddie-corner feature is positioned about at least one of the two corners of the main body portion. The caddie-corner feature and the main body portion comprise a single proof mass having a z-sense pivot axis disposed at an angle of ninety degrees to a diagonal extending from the caddie-corner feature to an opposite corner of the main body portion. The proof mass is configured to teeter-totter corner to corner about the z-sense pivot axis in response z-axis acceleration and/or z-axis deceleration.
Public/Granted literature
- US20090165558A1 CADDIE-CORNER SINGLE PROOF MASS XYZ MEMS TRANSDUCER Public/Granted day:2009-07-02
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