Invention Grant
US07793544B2 Microelectromechanical inertial sensor, in particular for free-fall detection applications
有权
微机电惯性传感器,特别适用于自由落体检测应用
- Patent Title: Microelectromechanical inertial sensor, in particular for free-fall detection applications
- Patent Title (中): 微机电惯性传感器,特别适用于自由落体检测应用
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Application No.: US11777702Application Date: 2007-07-13
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Publication No.: US07793544B2Publication Date: 2010-09-14
- Inventor: Angelo Merassi , Sarah Zerbini , Ernesto Lasalandra , Benedetto Vigna
- Applicant: Angelo Merassi , Sarah Zerbini , Ernesto Lasalandra , Benedetto Vigna
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Agent Lisa K. Jorgenson; Timothy L. Boller
- Priority: EP06425485 20060714
- Main IPC: G01P15/08
- IPC: G01P15/08

Abstract:
An inertial sensor provided with a detection structure sensitive to a first, a second and a third component of acceleration along respective directions of detection, and generating respective electrical quantities as a function of said components of acceleration. The detection structure supplies at output a resultant electrical quantity obtained as combination of said electrical quantities, and correlated to the value of a resultant acceleration acting on the inertial sensor, given by a vector sum of the components of acceleration. In particular, the detection structure is of a microelectromechanical type, and comprises a mobile portion made of semiconductor material forming with a fixed portion a first, a second and a third detection capacitor, and an electrical-interconnection portion, connecting the detection capacitors in parallel; the resultant electrical quantity being the capacitance obtained from said connection in parallel.
Public/Granted literature
- US20080011080A1 MICROELECTROMECHANICAL INERTIAL SENSOR, IN PARTICULAR FOR FREE-FALL DETECTION APPLICATIONS Public/Granted day:2008-01-17
Information query
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