Invention Grant
US07794539B2 Method for producing III group element nitride crystal, production apparatus for use therein, and semiconductor element produced thereby
失效
生产III族元素氮化物晶体的方法,其中使用的制造装置以及由此制造的半导体元件
- Patent Title: Method for producing III group element nitride crystal, production apparatus for use therein, and semiconductor element produced thereby
- Patent Title (中): 生产III族元素氮化物晶体的方法,其中使用的制造装置以及由此制造的半导体元件
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Application No.: US10599501Application Date: 2005-03-31
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Publication No.: US07794539B2Publication Date: 2010-09-14
- Inventor: Hisashi Minemoto , Yasuo Kitaoka , Isao Kidoguchi , Yusuke Mori , Fumio Kawamura , Takatomo Sasaki , Yasuhito Takahashi
- Applicant: Hisashi Minemoto , Yasuo Kitaoka , Isao Kidoguchi , Yusuke Mori , Fumio Kawamura , Takatomo Sasaki , Yasuhito Takahashi
- Applicant Address: JP Osaka JP Osaka
- Assignee: Panasonic Corporation,Yusuke Mori
- Current Assignee: Panasonic Corporation,Yusuke Mori
- Current Assignee Address: JP Osaka JP Osaka
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2004-106676 20040331
- International Application: PCT/JP2005/006365 WO 20050331
- International Announcement: WO2005/095681 WO 20051013
- Main IPC: C30B9/00
- IPC: C30B9/00 ; C30B30/04 ; C30B28/06 ; C30B11/00

Abstract:
A method for producing Group-III-element nitride crystals by which an improved growth rate is obtained and large high-quality crystals can be grown in a short time, a producing apparatus used therein, and a semiconductor element obtained using the method and the apparatus are provided. The method is a method for producing Group-III-element nitride crystals that includes a crystal growth process of subjecting a material solution containing a Group III element, nitrogen, and at least one of alkali metal and alkaline-earth metal to pressurizing and heating under an atmosphere of a nitrogen-containing gas so that the nitrogen and the Group III element in the material solution react with each other to grow crystals. The method further includes, prior to the crystal growth process, a material preparation process of preparing the material solution in a manner that under an atmosphere of a nitrogen-containing gas, at least one of an ambient temperature and an ambient pressure is set so as to be higher than is set as a condition for the crystal growth process so that the nitrogen is allowed to dissolve in a melt containing the Group III element and the at least one of alkali metal and alkaline-earth metal. The method according to the present invention can be performed by using, for example, the producing apparatus shown in FIG. 7.
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