Invention Grant
- Patent Title: Gallium nitride-based material and method of manufacturing the same
- Patent Title (中): 基于氮化镓的材料及其制造方法
-
Application No.: US12282961Application Date: 2007-03-08
-
Publication No.: US07794541B2Publication Date: 2010-09-14
- Inventor: Hiroyuki Shibata , Yoshio Waseda , Kenji Shimoyama , Kazumasa Kiyomi , Hirobumi Nagaoka
- Applicant: Hiroyuki Shibata , Yoshio Waseda , Kenji Shimoyama , Kazumasa Kiyomi , Hirobumi Nagaoka
- Applicant Address: JP Sendai-shi JP Tokyo
- Assignee: Tohoku University,Mitsubishi Chemical Corporation
- Current Assignee: Tohoku University,Mitsubishi Chemical Corporation
- Current Assignee Address: JP Sendai-shi JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-067907 20060313; JP2007-056353 20070306
- International Application: PCT/JP2007/054591 WO 20070308
- International Announcement: WO2007/119319 WO 20071025
- Main IPC: C30B23/00
- IPC: C30B23/00

Abstract:
Disclosed is a method of manufacturing a GaN-based material having high thermal conductivity. A gallium nitride-based material is grown by HVPE (Hydride Vapor Phase Epitaxial Growth) by supplying a carrier gas (G1) containing H2 gas, GaCl gas (G2), and NH3 gas (G3) to a reaction chamber (10), and setting the growth temperature at 900 (° C.) (inclusive) to 1,200 (° C.) (inclusive), the growth pressure at 8.08×104 (Pa) (inclusive) to 1.21×105 (Pa) (inclusive), the partial pressure of the GaCl gas (G2) at 1.0×104 (Pa) (inclusive) to 1.0×104 (Pa) (inclusive), and the partial pressure of the NH3 gas (G3) at 9.1×102 (Pa) (inclusive) to 2.0×104 (Pa) (inclusive).
Public/Granted literature
- US20090081110A1 GALLIUM NITRIDE-BASED MATERIAL AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2009-03-26
Information query