Invention Grant
- Patent Title: Optical components and production thereof
- Patent Title (中): 光学部件及其制造
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Application No.: US10583719Application Date: 2004-12-23
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Publication No.: US07794610B2Publication Date: 2010-09-14
- Inventor: Claire Divoux , Marie-Helene Vaudaine , Thierry Enot
- Applicant: Claire Divoux , Marie-Helene Vaudaine , Thierry Enot
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique
- Current Assignee: Commissariat a l'Energie Atomique
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0351209 20031226
- International Application: PCT/FR2004/050758 WO 20041223
- International Announcement: WO2005/069057 WO 20050728
- Main IPC: H01L21/302
- IPC: H01L21/302 ; B81C1/00 ; B81C3/00

Abstract:
The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.
Public/Granted literature
- US20070137989A1 Optical components and production therof Public/Granted day:2007-06-21
Information query
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