Invention Grant
US07794610B2 Optical components and production thereof 失效
光学部件及其制造

Optical components and production thereof
Abstract:
The invention relates to a method for making an actuation system for an optical component comprising: etching of a first face of a component, to form pads on it, etching of a second face of the component, to expose a membrane made of the same material as the pads, production of the actuation means of the pads and the membrane.
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