Invention Grant
- Patent Title: Semiconductor devices having Fin-type active areas and methods of manufacturing the same
- Patent Title (中): 具有Fin型有源区的半导体器件及其制造方法
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Application No.: US11979748Application Date: 2007-11-08
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Publication No.: US07795099B2Publication Date: 2010-09-14
- Inventor: Hyun-jae Kang , Ji-young Lee , Han-ku Cho , Gi-sung Yeo
- Applicant: Hyun-jae Kang , Ji-young Lee , Han-ku Cho , Gi-sung Yeo
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2006-0110180 20061108
- Main IPC: H01L21/762
- IPC: H01L21/762

Abstract:
A semiconductor device having a fin type active area includes a plurality of active regions, a first device isolation layer and a recessed second device isolation layer disposed in a direction of gate electrodes of the semiconductor device. A recessed second device isolation layer and a first device isolation layer are disposed in a vertical direction of the gate electrodes. The first device isolation layer and the plurality of active regions are alternately disposed in a first direction of the plurality of active regions.
Public/Granted literature
- US20080105931A1 Semiconductor devices having Fin-type active areas and methods of manufacturing the same Public/Granted day:2008-05-08
Information query
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