Invention Grant
- Patent Title: Pattern measuring method and electron microscope
- Patent Title (中): 图案测量方法和电子显微镜
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Application No.: US12038116Application Date: 2008-02-27
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Publication No.: US07795581B2Publication Date: 2010-09-14
- Inventor: Shuichi Nakagawa , Sho Takami
- Applicant: Shuichi Nakagawa , Sho Takami
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2007-052150 20070302
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N23/00 ; G21K7/00

Abstract:
An object of the present invention is to provide a pattern measuring method and an electron microscope that achieve truly high measurement throughput by achieving both precise location of a measurement target position and high-speed movement of the scanning position of an electron beam to the measurement target position. In order to attain the object described above, according to an aspect of the present invention, there is provided a pattern measuring method and an apparatus that move the scanning position of an electron beam based on coordinate information about a first pattern, which is a target to be measured with the electron beam, move the scanning position of the electron beam to a region comprising a second pattern, the relative distance of which from the first pattern is previously registered, in a case where detection of the first pattern at the point of arrival fails, and move the scanning position of the electron beam based on detection of the second pattern and information about the relative distance.
Public/Granted literature
- US20080210865A1 Pattern Measuring Method and Electron Microscope Public/Granted day:2008-09-04
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