The invention is to provide an inspection apparatus causing interactions of plural times between an object and an electromagnetic wave, thereby enabling inspection with a satisfactory sensitivity even for an object of a trace amount. The inspection apparatus detects information from an object 112 based on a change in an electromagnetic wave transmission state caused by plural times of interactions between the electromagnetic wave and the object 112. The inspection apparatus includes a transmission line 16, an electromagnetic wave supplying and detecting unit 111 for supplying the transmission line 16 with the electromagnetic wave and detecting the electromagnetic wave, a reflection unit 110 for reflecting the electromagnetic wave transmitting through the transmission line 16, and an inspection unit 113 for placing the object 112 between the electromagnetic wave supplying and detecting unit 111 and the reflection unit 110, wherein the transmission line 16, the reflection unit 110 and the inspection unit 113 are formed on a same substrate 11.