Invention Grant
- Patent Title: DRAM device and method of manufacturing the same
- Patent Title (中): DRAM装置及其制造方法
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Application No.: US12149406Application Date: 2008-05-01
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Publication No.: US07795659B2Publication Date: 2010-09-14
- Inventor: Hong-Sik Yoon , In-Seok Yeo , Seung-Jae Baik , Zong-Liang Huo , Shi-Eun Kim
- Applicant: Hong-Sik Yoon , In-Seok Yeo , Seung-Jae Baik , Zong-Liang Huo , Shi-Eun Kim
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR2005-0018405 20050305
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/119

Abstract:
In a DRAM device and a method of manufacturing the same, a multiple tunnel junction (MTJ) structure is provided, which includes conductive patterns and nonconductive patterns alternately stacked on each other. The nonconductive patterns have a band gap larger than a band gap of the conductive patterns. A gate insulation layer and a gate electrode are formed on a sidewall of the MTJ structure. A word line is connected with the MTJ structure, and a bit line is connected with one of top and bottom surfaces of the MTJ structure. A capacitor is connected with one of top and bottom surfaces of the MTJ structure that is not connected with the bit line. Current leakage in the DRAM device is reduced and a unit cells may be vertically stacked on the substrate, so a smaller surface area of the substrate is required for the DRAM device.
Public/Granted literature
- US20080246067A1 Dram device and method of manufacturing the same Public/Granted day:2008-10-09
Information query
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