Invention Grant
- Patent Title: Nanowire field-effect transistors
- Patent Title (中): 纳米线场效应晶体管
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Application No.: US11850608Application Date: 2007-09-05
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Publication No.: US07795677B2Publication Date: 2010-09-14
- Inventor: Sarunya Bangsaruntip , Guy Moshe Cohen , Katherine Lynn Saenger
- Applicant: Sarunya Bangsaruntip , Guy Moshe Cohen , Katherine Lynn Saenger
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Vazken Alexanian; Michael J. Chang, LLC
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
Field-effect transistors (FETs) having nanowire channels are provided. In one aspect, a FET is provided. The FET comprises a substrate having a silicon-on-insulator (SOI) layer which is divided into at least two sections electrically isolated from one another, one section included in a source region and the other section included in a drain region; a channel region connecting the source region and the drain region and including at least one nanowire; an epitaxial semiconductor material, grown from the SOI layer, covering the nanowire and attaching the nanowire to each section of the SOI layer; and a gate over the channel region.
Public/Granted literature
- US20090057762A1 Nanowire Field-Effect Transistors Public/Granted day:2009-03-05
Information query
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