Invention Grant
- Patent Title: Semiconductor device and method manufacturing semiconductor device
- Patent Title (中): 半导体器件和方法制造半导体器件
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Application No.: US11700147Application Date: 2007-01-31
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Publication No.: US07795682B2Publication Date: 2010-09-14
- Inventor: Akio Kaneko , Atsushi Yagishita , Satoshi Inaba
- Applicant: Akio Kaneko , Atsushi Yagishita , Satoshi Inaba
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2006-022310 20060131
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
The disclosure concerns a method of manufacturing a semiconductor device including forming a plurality of fins made of a semiconductor material on an insulating layer; forming a gate insulating film on side surfaces of the plurality of fins; and forming a gate electrode on the gate insulating film in such a manner that a compressive stress is applied to a side surface of a first fin which is used in an NMOSFET among the plurality of fins in a direction perpendicular to the side surface and a tensile stress is applied to a side surface of a second fin which is used in a PMOSFET among the plurality of fins in a direction perpendicular to the side surface.
Public/Granted literature
- US20070190708A1 Semiconductor device and method manufacturing semiconductor device Public/Granted day:2007-08-16
Information query
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