Invention Grant
US07795688B2 Semiconductor device and method of manufacturing semiconductor device 有权
半导体装置及其制造方法

Semiconductor device and method of manufacturing semiconductor device
Abstract:
A semiconductor device including, on a substrate, a first conduction type MOS transistor having a gate electrode provided in a first trench formed in an insulation film on the substrate, and a second conduction type MOS transistor having a gate electrode provided in a second trench formed in the insulation film, the first conduction type and the second conduction type being opposite types.
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