Invention Grant
US07795732B2 Ceramic wiring board and process for producing the same, and semiconductor device using the same 有权
陶瓷接线板及其制造方法以及使用其的半导体器件

Ceramic wiring board and process for producing the same, and semiconductor device using the same
Abstract:
A ceramic wiring board 10 includes a ceramic substrate 11 and a wiring layer 12 formed on the ceramic substrate 11. The wiring layer 12 includes a wiring part 13 and a connection part 14, the wiring part 13 having a base metal layer 15, a first diffusion preventive layer 16 and a first Au layer 17 which are stacked in sequence on a surface of the ceramic substrate 11, and the connection part 14 having a second diffusion preventive layer 19, a void suppression layer 20 and a solder layer 18 which are stacked in sequence at a desired position on the wiring part 13. The void suppression layer 20 is made of, for example, Au or an Au—Sn alloy containing 85 mass % or more of Au.
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