Invention Grant
- Patent Title: Controlled plasma power supply
- Patent Title (中): 受控等离子电源
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Application No.: US11944179Application Date: 2007-11-21
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Publication No.: US07795817B2Publication Date: 2010-09-14
- Inventor: Moritz Nitschke
- Applicant: Moritz Nitschke
- Applicant Address: DE Freiburg
- Assignee: HUETTINGER Elektronik GmbH + Co. KG
- Current Assignee: HUETTINGER Elektronik GmbH + Co. KG
- Current Assignee Address: DE Freiburg
- Agency: Fish & Richardson P.C.
- Main IPC: H01J7/24
- IPC: H01J7/24

Abstract:
A plasma power supply system for producing electrical power in the range between 1 kW and 100 kW for a plasma processing system and supplying the power to a plasma chamber through a power line connection, the plasma power supply system includes a power converter, a monitoring section, an arc diverter, a control section with an arc diverter control section and an arc detection section, and an input device wherein the input device is connected to the arc diverter.
Public/Granted literature
- US20080122369A1 CONTROLLED PLASMA POWER SUPPLY Public/Granted day:2008-05-29
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