Invention Grant
- Patent Title: Cold cathode pressure sensor
- Patent Title (中): 冷阴极压力传感器
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Application No.: US11885719Application Date: 2006-03-02
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Publication No.: US07795876B2Publication Date: 2010-09-14
- Inventor: Daniel Wetzig , Ludolf Gerdau
- Applicant: Daniel Wetzig , Ludolf Gerdau
- Applicant Address: DE Cologne
- Assignee: Inficon GmbH
- Current Assignee: Inficon GmbH
- Current Assignee Address: DE Cologne
- Agency: Marjama Muldoon Blasiak & Sullivan, LLP
- Priority: DE102005010716 20050309
- International Application: PCT/EP2006/060397 WO 20060302
- International Announcement: WO2006/094927 WO 20060914
- Main IPC: G01L21/30
- IPC: G01L21/30 ; G01N27/62

Abstract:
A cold cathode pressure sensor has gastight housing, an anode and a cathode arranged in the housing, and a radiation source directed to the cathode for igniting a cold cathode discharge. The housing has a test gas inlet and is at least partly made of glass. The radiation source is arranged outside the housing and irradiates the cathode through the housing glass. The radiation source substantially emits a radiation of a wavelength of more than 400 nm and less than 1,400 nm.
Public/Granted literature
- US20080142710A1 Cold Cathode Pressure Sensor Public/Granted day:2008-06-19
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