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US07795997B2 Apparatus and method for measuring an environmental condition 有权
用于测量环境条件的装置和方法

Apparatus and method for measuring an environmental condition
Abstract:
A sensor senses an environmental condition. The sensor includes a film bulk acoustic resonator that includes a layer of material that causes resonant frequency and/or quality factor shifts of the film bulk acoustic resonator in response to changes in the environmental condition. The environmental condition may be relative humidity and the layer of material may be a moisture absorptive material.
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