Invention Grant
- Patent Title: Vertical type heat processing apparatus and vertical type heating method
- Patent Title (中): 立式加热装置和立式加热方式
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Application No.: US12000678Application Date: 2007-12-14
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Publication No.: US07798811B2Publication Date: 2010-09-21
- Inventor: Hiromi Nitadori , Hirofumi Kaneko
- Applicant: Hiromi Nitadori , Hirofumi Kaneko
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2006-346362 20061222
- Main IPC: F27D3/12
- IPC: F27D3/12

Abstract:
A vertical type heat processing apparatus prevents falling-down of a boat placed on a heat insulating mount due to an external force, such as an earthquake. The apparatus includes a heating furnace having a furnace port, a cover, a pair of substrate holding tools, each to be placed on the cover via a heat insulating mount and to hold multiple substrates, a rotating mechanism, and a lifting mechanism to raise and lower the cover to carry in and carry out the substrate holding tool relative to the furnace. While one of the substrate holding tools is located in the furnace, the other is placed on a table, for loading the substrates. Each substrate holding tool is carried between the table and the heat insulating mount due to a carrier mechanism. Further, a locking part and a part to be locked can be engaged with each other.
Public/Granted literature
- US20080153049A1 Vertical type heat processing apparatus and vertical type heating method Public/Granted day:2008-06-26
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