Invention Grant
- Patent Title: Microwave plasma exciters
- Patent Title (中): 微波等离子体激发器
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Application No.: US11766875Application Date: 2007-06-22
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Publication No.: US07799119B2Publication Date: 2010-09-21
- Inventor: Zenon Zakrzewski , Dariusz Czylkowski , Mariusz Jasinski , Michel Moisan , Daniel Guerin , Christian Larquet , Jean-Christophe Rostaing
- Applicant: Zenon Zakrzewski , Dariusz Czylkowski , Mariusz Jasinski , Michel Moisan , Daniel Guerin , Christian Larquet , Jean-Christophe Rostaing
- Applicant Address: FR Paris
- Assignee: L'Air Liquide, Societe Anonyme pour l'Etude Et l'Exploitation des Procedes Georges Claude
- Current Assignee: L'Air Liquide, Societe Anonyme pour l'Etude Et l'Exploitation des Procedes Georges Claude
- Current Assignee Address: FR Paris
- Agent Patricia E. McQueeney
- Main IPC: B03C3/016
- IPC: B03C3/016
Abstract:
The invention relates to a microwave plasma exciter device which includes a waveguide (23) for concentrating the microwaves; and a plasma generator (110, 120) for forming a plasma, which are disposed in a microwave concentration zone.
Public/Granted literature
- US20090020009A1 MICROWAVE PLASMA EXCITERS Public/Granted day:2009-01-22
Information query
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