Invention Grant
- Patent Title: Silicon single crystal ingot and wafer, growing apparatus and method thereof
- Patent Title (中): 硅单晶锭和晶圆,生长装置及其方法
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Application No.: US11460408Application Date: 2006-07-27
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Publication No.: US07799130B2Publication Date: 2010-09-21
- Inventor: Young Ho Hong , Man Seok Kwak , Ill-Soo Choi , Hyon-Jong Cho , Hong Woo Lee
- Applicant: Young Ho Hong , Man Seok Kwak , Ill-Soo Choi , Hyon-Jong Cho , Hong Woo Lee
- Applicant Address: KR Gumi-Si
- Assignee: Siltron, Inc.
- Current Assignee: Siltron, Inc.
- Current Assignee Address: KR Gumi-Si
- Agency: Miller, Matthias & Hull
- Priority: KR10-2005-0068482 20050727; KR10-2005-0109305 20051115
- Main IPC: C30B15/00
- IPC: C30B15/00

Abstract:
A silicon single crystal ingot growing apparatus for growing a silicon single crystal ingot based on a Czochralski method The silicon single crystal ingot growing apparatus includes a chamber; a crucible provided in the chamber, and for containing a silicon melt; a heater provided at the outside of the crucible and for heating the silicon melt; a pulling unit for ascending a silicon single crystal grown from the silicon melt; and a plurality of magnetic members provided at the outside of the chamber and for asymmetrically applying a magnetic field to the silicon melt Such a structure can uniformly controls an oxygen concentration at a rear portion of a silicon single crystal ingot using asymmetric upper/lower magnetic fields without replacing a hot zone In addition, such a structure can controls a flower phenomenon generated on the growth of the single crystal by the asymmetric magnetic fields without a loss such as the additional hot zone (H/Z) replacement, P/S down, and SR variance.
Public/Granted literature
- US20070022943A1 A Silicon Single Crystal Ingot and Wafer, Growing Apparatus and Method Therof Public/Granted day:2007-02-01
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