Invention Grant
US07799134B2 Shower plate having projections and plasma CVD apparatus using same
有权
具有投影的淋浴板和使用其的等离子体CVD装置
- Patent Title: Shower plate having projections and plasma CVD apparatus using same
- Patent Title (中): 具有投影的淋浴板和使用其的等离子体CVD装置
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Application No.: US11061986Application Date: 2005-02-18
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Publication No.: US07799134B2Publication Date: 2010-09-21
- Inventor: Naoto Tsuji , Hideaki Fukuda , Hiroki Arai , Yoshinori Morisada , Tamihiro Kobayashi
- Applicant: Naoto Tsuji , Hideaki Fukuda , Hiroki Arai , Yoshinori Morisada , Tamihiro Kobayashi
- Applicant Address: JP Tokyo
- Assignee: ASM Japan K.K.
- Current Assignee: ASM Japan K.K.
- Current Assignee Address: JP Tokyo
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: JP2004-044854 20040220
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A shower plate 122 has protrusions 22 formed on the front face used with a first electrode in a plasma CVD apparatus. A plane-surface portion 23 is left around apertures of gas inlet holes 21 formed in the shower plate 122. With protrusions 22 being formed, a surface area of the first electrode is increased.
Public/Granted literature
- US20050183666A1 Shower plate having projections and plasma CVD apparatus using same Public/Granted day:2005-08-25
Information query
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