Invention Grant
US07799414B2 Laminated structure, donor substrate, and method for fabricating laminated structure 有权
叠层结构,供体基板和层叠结构的制造方法

Laminated structure, donor substrate, and method for fabricating laminated structure
Abstract:
A laminated structure includes: a plurality of first electroconductive films each having a prescribed hardness; and a plurality of second electroconductive films each having a hardness that is lower than the prescribed hardness. The first and second electroconductive films are laminated alternately.
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