Invention Grant
- Patent Title: Optical waveguide apparatus and method for manufacturing the same
- Patent Title (中): 光波导装置及其制造方法
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Application No.: US12076617Application Date: 2008-03-20
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Publication No.: US07799589B2Publication Date: 2010-09-21
- Inventor: Shoji Akiyama , Yoshihiro Kuboto , Atsuo Ito , Koichi Tanaka , Yuuji Tobisaka , Makoto Kawai
- Applicant: Shoji Akiyama , Yoshihiro Kuboto , Atsuo Ito , Koichi Tanaka , Yuuji Tobisaka , Makoto Kawai
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-105178 20070412
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An optical waveguide apparatus having a very simple structure that can modulate a signal light guided through an optical waveguide is provided. A photoresist 13 is applied to an upper side of an SOI film 12, a photoresist mask 14 is formed, and the SOI film in a region that is not covered with the photoresist mask 14 is removed by etching to obtain an optical waveguide 15 having a single-crystal silicon core. Further, a light emitting device capable of irradiating the single-crystal silicon core with a light having a wavelength of 1.1 μm or below is provided on a back surface side of a quartz substrate 20 to provide an optical waveguide apparatus. When the light emitting device 30 does not apply a light, the light guided through the optical waveguide 15 is guided as it is. However, when the light emitting device 30 applies a light to form each pair of an electron and a hole in the irradiated region 16, the light guided through the optical waveguide 15 is absorbed by the pair of an electron and a hole, thereby enabling switching (modulation) for turning ON/OFF an optical signal depending on presence/absence (ON or OFF) of application of the light from the light emitting device 30.
Public/Granted literature
- US20090032831A1 Optical waveguide apparatus and method for manufacturing the same Public/Granted day:2009-02-05
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