Invention Grant
- Patent Title: Method of manufacturing dual orientation wafers
- Patent Title (中): 制造双取向晶圆的方法
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Application No.: US11955436Application Date: 2007-12-13
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Publication No.: US07799609B2Publication Date: 2010-09-21
- Inventor: Brent A. Anderson , John J. Ellis-Monaghan , Alain Loiseau , Kirk D. Peterson
- Applicant: Brent A. Anderson , John J. Ellis-Monaghan , Alain Loiseau , Kirk D. Peterson
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb I.P. Law Firm, LLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/04

Abstract:
Disclosed is a method of manufacturing dual orientation wafers. A trench is formed in a multi-layer wafer to a silicon substrate with a first crystalline orientation. The trench is filled with a silicon material (e.g., amorphous silicon or polysilicon trench). Isolation structures are formed to isolate the silicon material in the trench from a semiconductor layer with a second crystalline orientation. Additional isolation structures are formed within the silicon material in the trench and within the semiconductor layer. A patterned amorphization process is performed on the silicon material in the trench and followed by a recrystallization anneal such that the silicon material in the trench recrystallizes with the same crystalline orientation as the silicon substrate. The resulting structure is a semiconductor wafer with isolated semiconductor areas on the same plane having different crystalline orientations as well as isolated sections within each semiconductor area for device formation.
Public/Granted literature
- US20080096370A1 METHOD OF MANUFACTURING DUAL ORIENTATION WAFERS Public/Granted day:2008-04-24
Information query
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