Invention Grant
- Patent Title: Method for forming capacitor in dynamic random access memory
- Patent Title (中): 在动态随机存取存储器中形成电容器的方法
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Application No.: US12179996Application Date: 2008-07-25
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Publication No.: US07799653B2Publication Date: 2010-09-21
- Inventor: Heng-Yuan Lee , Ching-Chiun Wang , Tai-Yuan Wu
- Applicant: Heng-Yuan Lee , Ching-Chiun Wang , Tai-Yuan Wu
- Applicant Address: TW Hsin-Chu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsin-Chu
- Agency: WPAT., P.C.
- Agent Justin King
- Priority: TW97102758A 20080125
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A method for forming a capacitor in a dynamic random access memory, comprising steps of: providing a semiconductor substrate having at least a transistor, whereon an interlayer dielectric layer having at least a first plug is formed so that the first plug is connected to the drain of the transistor; depositing an etching stop layer on the first plug and the interlayer dielectric layer; depositing a first insulating layer on the etching stop layer; forming at least a second plug on the first insulating layer and the etching stop layer so that the second plug is connected to the first plug; depositing a second insulating layer on the first insulating layer and the second plug; forming at least a mold cavity in the second insulating layer so that the aperture of the mold cavity is larger than the diameter of the second plug and there is a deviation between the mold cavity and the second plug; removing the first insulating layer in the mold cavity until the etching stop layer; depositing a first electrode layer to cover the second insulating layer, a sidewall portion of the mold cavity, the second plug and the etching stop layer; removing the second insulating layer so that the first electrode layer forms a single open-ended cavity; and depositing a dielectric layer and a second electrode layer.
Public/Granted literature
- US20090191685A1 METHOD FOR FORMING CAPACITOR IN DYNAMIC RANDOM ACCESS MEMORY Public/Granted day:2009-07-30
Information query
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