Invention Grant
- Patent Title: Microchannels for BioMEMS devices
- Patent Title (中): BioMEMS设备的微通道
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Application No.: US12045853Application Date: 2008-03-11
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Publication No.: US07799656B2Publication Date: 2010-09-21
- Inventor: Luc Ouellet , Patrick Wright
- Applicant: Luc Ouellet , Patrick Wright
- Applicant Address: CA Waterloo, Ontario
- Assignee: DALSA Semiconductor Inc.
- Current Assignee: DALSA Semiconductor Inc.
- Current Assignee Address: CA Waterloo, Ontario
- Agency: Marks & Clerk
- Agent Richard J. Mitchell
- Main IPC: H01L21/46
- IPC: H01L21/46 ; H01L21/31
Abstract:
A method is disclosed for making a MEMS device wherein anhydrous HF exposed silicon nitride is used as a temporary adhesion layer allowing the transfer of a layer from a Carrier Wafer to a Device Wafer.
Public/Granted literature
- US20080299695A1 MICROCHANNELS FOR BioMEMS DEVICES Public/Granted day:2008-12-04
Information query
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