Invention Grant
- Patent Title: Method for growing a back surface contact on an imaging detector used in conjunction with back illumination
- Patent Title (中): 在与背照射结合使用的成像检测器上生长背面接触的方法
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Application No.: US11859470Application Date: 2007-09-21
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Publication No.: US07800040B2Publication Date: 2010-09-21
- Inventor: Jordana Blacksberg , Michael Eugene Hoenk , Shouleh Nikzad
- Applicant: Jordana Blacksberg , Michael Eugene Hoenk , Shouleh Nikzad
- Applicant Address: US CA Pasadena
- Assignee: California Institute of Technology
- Current Assignee: California Institute of Technology
- Current Assignee Address: US CA Pasadena
- Agency: Zilka-Kotab, PC
- Main IPC: H01L27/00
- IPC: H01L27/00
Abstract:
A method is provided for growing a back surface contact on an imaging detector used in conjunction with back illumination. In operation, an imaging detector is provided. Additionally, a back surface contact (e.g. a delta-doped layer, etc.) is grown on the imaging detector utilizing a process that is performed at a temperature less than 450 degrees Celsius.
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