Invention Grant
- Patent Title: Electromagnet with active field containment
- Patent Title (中): 具有活性场容纳的电磁体
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Application No.: US11276128Application Date: 2006-02-15
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Publication No.: US07800082B2Publication Date: 2010-09-21
- Inventor: Peter L. Kellerman , Keneth H. Purser
- Applicant: Peter L. Kellerman , Keneth H. Purser
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/317
- IPC: H01J37/317

Abstract:
An electromagnet and related ion implanter system including active field containment are disclosed. The electromagnet provides a dipole magnetic field within a tall, large gap with minimum distortion and degradation of strength. In one embodiment, an electromagnet for modifying an ion beam includes: a ferromagnetic box structure including six sides; an opening in each of a first side and a second opposing side of the ferromagnetic box structure for passage of the ion beam therethrough; and a plurality of current-carrying wires having a path along an inner surface of the ferromagnetic box structure, the inner surface including the first side and the second opposing side and a third side and a fourth opposing side, wherein the plurality of current-carrying wires are positioned to pass around each of the openings of the first and second opposing sides.
Public/Granted literature
- US20070187619A1 ELECTROMAGNET WITH ACTIVE FIELD CONTAINMENT Public/Granted day:2007-08-16
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