Invention Grant
US07800083B2 Plasma electron flood for ion beam implanter 有权
离子束注入机的等离子体电子泛滥

Plasma electron flood for ion beam implanter
Abstract:
A plasma electron flood system, comprising a housing configured to contain a gas, and comprising an elongated extraction slit, and a cathode and a plurality of anodes residing therein and wherein the elongated extraction slit is in direct communication with an ion implanter, wherein the cathode emits electrons that are drawn to the plurality of anodes through a potential difference therebetween, wherein the electrons are released through the elongated extraction slit as an electron band for use in neutralizing a ribbon ion beam traveling within the ion implanter.
Public/Granted literature
Information query
Patent Agency Ranking
0/0