Invention Grant
- Patent Title: Getter on die in an upper sense plate designed system
- Patent Title (中): 吸气器在上感板设计系统中死亡
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Application No.: US12140006Application Date: 2008-06-16
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Publication No.: US07800190B2Publication Date: 2010-09-21
- Inventor: Bryan Seppala , Jon DCamp , Max Glenn
- Applicant: Bryan Seppala , Jon DCamp , Max Glenn
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Fogg & Powers LLC
- Main IPC: G01L9/04
- IPC: G01L9/04

Abstract:
A microelectromechanical system (MEMS) hermetically sealed package device that is less labor intensive to construct and thus less expensive to manufacture. An example package device includes a package having a bottom section and a lid. A MEMS die includes upper and lower plates made in accordance with upper sense plate design. The MEMS die is mounted to the bottom section. The upper and lower plates form a cavity that receives a MEMS device. The upper and lower plates are bonded by one or more bond pads and a seal ring that surrounds the cavity. The seal ring includes grooves that allow exposure of the cavity to the space within the package. A getter material applied to a top surface of the MEMS die on the upper plate. The getter material is activated during or after the lid is mounted to the bottom section.
Public/Granted literature
- US20090309203A1 GETTER ON DIE IN AN UPPER SENSE PLATE DESIGNED SYSTEM Public/Granted day:2009-12-17
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