Invention Grant
US07800239B2 Thick metal interconnect with metal pad caps at selective sites and process for making the same 有权
在选择性位置的金属焊盘盖的金属金属互连和制造相同的工艺

Thick metal interconnect with metal pad caps at selective sites and process for making the same
Abstract:
The present invention relates to a high power IC (Integrated Circuit) semiconductor device and process for making same. More particularly, the invention encompasses a high conductivity or low resistance metal stack to reduce the device R-on which is stable at high temperatures while in contact with a thick aluminum wire-bond that is required for high current carrying capability and is mechanically stable against vibration during use, and process thereof. The invention further discloses a thick metal interconnect with metal pad caps at selective sites, and process for making the same.
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