Invention Grant
US07800258B2 Driving apparatus, exposure apparatus, and device manufacturing method
有权
驱动装置,曝光装置和装置的制造方法
- Patent Title: Driving apparatus, exposure apparatus, and device manufacturing method
- Patent Title (中): 驱动装置,曝光装置和装置的制造方法
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Application No.: US12203771Application Date: 2008-09-03
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Publication No.: US07800258B2Publication Date: 2010-09-21
- Inventor: Atsushi Ito
- Applicant: Atsushi Ito
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Div
- Priority: JP2007-228543 20070904
- Main IPC: H02K41/00
- IPC: H02K41/00

Abstract:
A driving apparatus includes a mover having a magnet, and a stator having a coil. The driving apparatus is adapted to control the electric current to be applied to the coil to cause relative movement between the mover and the stator. The stator includes a coil holding member configured to hold the coil, a supporting member configured to support the coil holding member movably in first and second directions, a restriction member configured to restrict movement of the coil holding member in the first direction and to allow movement of the coil holding member in the second direction, and a biasing unit configured to press the coil holding member against the restriction member.
Public/Granted literature
- US20090058199A1 DRIVING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD Public/Granted day:2009-03-05
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