Invention Grant
US07800258B2 Driving apparatus, exposure apparatus, and device manufacturing method 有权
驱动装置,曝光装置和装置的制造方法

Driving apparatus, exposure apparatus, and device manufacturing method
Abstract:
A driving apparatus includes a mover having a magnet, and a stator having a coil. The driving apparatus is adapted to control the electric current to be applied to the coil to cause relative movement between the mover and the stator. The stator includes a coil holding member configured to hold the coil, a supporting member configured to support the coil holding member movably in first and second directions, a restriction member configured to restrict movement of the coil holding member in the first direction and to allow movement of the coil holding member in the second direction, and a biasing unit configured to press the coil holding member against the restriction member.
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