Invention Grant
- Patent Title: Excimer lamp
- Patent Title (中): 准分子灯
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Application No.: US12230490Application Date: 2008-08-29
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Publication No.: US07800308B2Publication Date: 2010-09-21
- Inventor: Fumihiko Oda , Kengo Moriyasu
- Applicant: Fumihiko Oda , Kengo Moriyasu
- Applicant Address: JP Tokyo
- Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee: Ushio Denki Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Rader, Fishman & Grauer PLLC
- Priority: JP2007-226551 20070831
- Main IPC: H01J65/00
- IPC: H01J65/00

Abstract:
A excimer lamp comprises an electric discharge container in which a sealing member is provided between a lid member and an arc tube which does not contain silica, and a pair of external electrodes which are separately provided on an outer surface of the arc tube, wherein rare gas and a fluoride is enclosed in the electric discharge container, and the fluoride is sulfur hexafluoride, carbon tetrafluoride, or nitrogen trifluoride.
Public/Granted literature
- US20090058299A1 Excimer lamp Public/Granted day:2009-03-05
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