Invention Grant
US07800381B2 Test structures, systems, and methods for semiconductor devices 有权
用于半导体器件的测试结构,系统和方法

Test structures, systems, and methods for semiconductor devices
Abstract:
Test structures, systems, and methods for semiconductor devices are disclosed. In one embodiment, a test structure for a semiconductor device includes a winding disposed in at least one conductive material layer of the semiconductor device. At least a portion of the winding extends proximate a perimeter of the semiconductor device. The winding includes a first end and a second end. A first test pad is coupled to the first end of the winding, and a second test pad is coupled to the second end of the winding.
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