Invention Grant
US07800387B2 Method for detecting tips of probes, alignment method and storage medium storing the methods, and probe apparatus
有权
用于检测探针尖端的方法，存储方法的对准方法和存储介质以及探针装置
- Patent Title: Method for detecting tips of probes, alignment method and storage medium storing the methods, and probe apparatus
- Patent Title (中): 用于检测探针尖端的方法，存储方法的对准方法和存储介质以及探针装置
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Application No.: US11756281Application Date: 2007-05-31
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Publication No.: US07800387B2Publication Date: 2010-09-21
- Inventor: Yoshinao Kono
- Applicant: Yoshinao Kono
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-152302 20060531
- Main IPC: G01R31/02
- IPC: G01R31/02
Abstract:
There is provided a method for detecting a height of a tip of a probe before detecting a horizontal position of the probe tips of the probe, by using an alignment device having a first imaging unit and a second imaging unit provided at the mounting table. In the method, at a first step, a height of a load sensor provided in the mounting table is detected by using the first imaging unit. Further, at a second step, the mounting table is moved to make the probe come in contact with the load sensor and a height of the probe tip is detected based on a moving amount of the mounting table. In addition, it is confirmed whether the load sensor operates normally by using a pin, between the first and the second step.
Public/Granted literature
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