Semiconductor devices and methods are disclosed wherein a switching element or a current path is coupled to a substrate, and wherein a further element is coupled to said substrate and a control input of said switching element or said current path. Accordingly, in at least one embodiment, a semiconductor device comprises a substrate and a switching element with a control input coupled to the substrate. The semiconductor device includes a compensation element having a control input and an output. The control input of the compensation element is coupled to the substrate and the output of the compensation element is coupled to the control input of the switching element.